離子濺鍍機
SPT-20 離子濺鍍機是一種利用直流濺鍍原理將導電材料（金、鉑、鈀、鉑鈀）鍍膜到樣品表面的設備。非導電樣品也用於在電子顯微鏡下進行觀察，用來保護樣品表面不受注入的電子束的影響，並幫助電子流動。它也可用於薄膜型電極的形成。
特點 :
- 數位離子濺鍍機
- 真空濺鍍，一鍵操作系統自動達到設定壓力
- 具有濺鍍電流回授功能的穩定濺鍍
- 可與各種金屬靶搭配使用
- 使用低噪音旋轉泵。
應用
|
尺寸與重量 |
420(W) × 220(L) × 230(H)mm, 10kg |
|
消耗功率 |
AC 110 or 220V, 50/60 Hz, 300W |
|
腔體尺寸 |
Ø100mm |
|
靶材尺寸 |
50mm |
|
靶材 |
Au, Pt, Pt-Pd |
|
最大離子電壓 |
3kV |
|
離子電流 |
0 ~ 9mA |
|
濺鍍時間 |
10 ~ 300sec |
|
泵 |
旋轉泵(50L), 14kg |
The ion coater, SPT-20, is a device used for coating conductive materials (Au, Pt, Pd, Pt-Pd) onto the sample surfaces by using DC sputtering principle. Non-conductive samples are also used for observation under electron microscopes, and they are used to protect the sample surfaces from the injected electron beam and to help the electron flow. It can be used as an electrode formation of thin film type too.
features :
- Digital ion coater
- Vacuum. coating. One touch coating system up to the normal pressure
- Stable coating with coating Current Feedback function
- Can be used with various metal targets
- Uses low-noise rotary pump
application
|
Dimension & Weight |
420(W) × 220(L) × 230(H)mm, 10kg |
|
Power consumption |
AC 110 or 220V, 50/60 Hz, 300W |
|
Chamber size |
Ø100mm |
|
Target size |
50mm |
|
Target |
Au, Pt, Pt-Pd |
|
Maximum Ion voltage |
3kV |
|
Ion current |
0 ~ 9mA |
|
Coating time |
10 ~ 300sec |
|
Pump |
rotary pump (50L), 14kg |
